The invention is a closed loop MEMS Accelerometer implemented using suspended gate field effect transistors (SGFET) and the method of fabricating this sensor. This closed loop accelerometer (Closed loop in plane movable SGFET-CLIP-SGFET) has an in-plane movable suspended gate FETs in the differential amplifier configuration. In the closed loop operation, the CMOS-MEMS SGFET differential amplifier’s output voltage is used, through a closed loop controller and a high voltage charge pump to drive an actuator which brings the gate back to its resting position. The fabrication methods for CLIP-SGFET sensor devices includes wafer bonding based MEMS and FET integration and CMOS-MEMS based process integration schemes with tailored BEOL process etc.

Inventors: Dr. V.Seena, Anju Sebastian, Dr Naveen Kadayinti
Patent No. 456720
Date of filing: 5-11-2020
Date of Grant: 4-10-2023
Period of validity: 20 years