Introduction to Micro Electro Mechanical Systems
History of Microsystem Technology with overview on commercial products, Scaling laws, Microelectronic technologies for MEMS ,Materials and processing for MEMS, Micromachining modelling: Technology: Mechanics of Surface and microsystems, Bulk Micromachining, Transduction Microsystem Mechanisms (optical, piezoelectric, piezo resistive etc.), MEMS Micro sensors, and applications.