Introduction to Micro Electro Mechanical Systems (MEMS)
Broad-stroke overview – History of Microsystem Technology with overview on commercial products, Sensing & Actuation Principles of Microsystems, Applications-MEMS Materials and Fabrication Technology Microelectronic technologies for MEMS, Micromachining Technology: Surface and Bulk Micromachining, -Design and modelling of MEMS/Microsystem: Mechanics of MEMS/Microsystems- Elasticity-Stress/strain analysis of beams, membranes etc., thin film stress-Dynamics of Microsystems MEMS Transduction Mechanisms: Optical, piezoelectric, piezoresistive, FET based transduction etc.