Module 1: Microelectronics Device and Process Simulation Syllabus This module focuses on the simulation of fabrication processes and the microelectronics devices such as short channel MOSFET etc. using TCAD tools for Micro and nanoelectronic devices. The process simulation enables one to experiment with the device fabrication flow. The device simulation involves simulating the electrical characteristics of a process simulated/fabricated device.

Module 1: Design and simulation

This module focuses on design and simulation aspects of sensors, actuators and sensor systems. The laboratory course provides an overview of numerical and analytical modelling and design of microsystems using leading software in the field such as Coventor, MEMS+ or COMSOL Multiphysics for MEMS

Module 2: Fabrication and characterization of MEMS devices

1. Familiarization of unit processes and Fabrication of MEMS structures such as Micro cantilever beam/suspended membrane etc.

Classical scaling in CMOS, Moore’s law, clean room concept, material properties, crystal structure, lattice, growth of single crystal Si, cleaning and etching, thermal oxidation, dopant diffusion in silicon, deposition & growth (PVD, CVD, ALD, epitaxy, MBE, ALCVD etc.), ion- implantation, lithography (Photolithography, EUV lithography, X-ray lithography, e-beam lithography etc.), etch and cleaning, CMOS process integration, back end of line processes (Copper damascene process, Metal interconnects; Multi-level metallization schemes), advanced technologies (SOI MOSFETs, Strained Si, Silic

Introduction of software: Analog design flow, digital design flow

Digital:

Design of a complex digital circuit (eg. an ALU or a multiplier) using high level h ardware description languages, logic simulation and timing simulation. Extraction of critical paths and circuit simulation of critical path sub-circuits. Circuit partitioning and realisation using FPGAs or PALs.

Analog:

Introduction: Electronic Hardware Design – Requirement and Challenges, Overview of Design tools (LTSPICE, Microcontroller usage and coding, PCB Design softwares)

Stage 1: Design, Simulation, Analysis and Implementation of a typical (analog + digital) electronic module. Realization and testing of a bread-boarded model, followed by PCB schematic design. Fabrication of PCB using etching machine. Preferably Two students in a batch

Stage 2: Execution of an electronic design case study (preferably individual projects) and demonstrate its real-time working and applications.

Overview of CMOS device fundamentals (DC Characteristics, AC Characteristics, Processing overview). CMOS inverters, Static and Dynamic characteristics, Dynamic behavior, transition time, Propagation Delay, Power Consumption. MOS Circuit Layout & Simulation, Stick diagrams, Layout design rules, MOS device layout, Transistor layout, Inverter layout, circuits layout Combinational logic, Static MOS, Complementary MOS, Ratioed logic, Pass Transistor logic, Complex logic circuits, DSL, DCVSL, Transmission gate logic. Dynamic MOS design, Dynamic logic families and their performance.