I. Introduction to MEMS and MOEMS

Introduction to MEMS Technology and Applications Introduction to sensing and actuation principles, applications, various types of sensors and actuators Open loop and closed loop systems Materials used for MEMS fabrication and reasons to select them

Design of Microstructures with specific case studies like accelerometers, gyroscopes, RF switches Silicon micromachining and its opportunities

II. MEMS Devices: Fabrication and Technologies

Nonlinear optical susceptibility, wave equation description of nonlinear optical interactions - Sum frequency generation, Difference frequency generation, Second Harmonic generation, Phase matching condition,Optical parametric Oscillators, Quantum mechanical theory of nonlinear optical susceptibility- Schrodinger equation calculation, density matrix calculation.

Introduction to probability theory, properties of probabilities, random variabes and probability distribution, generating functions, examples of probability distributions, Gaussian probability distribution, central limit theorem, multivariate Gaussian distribution. Random processes, statistical ensembles, stationarity and ergodicity, properties of autocorrelation function, spectral properties of stationary random processes, orthogonal representation of a random process, Wiener Khinchine theorem, Karhunen–Loeve expansion.

Review of Semiconductor device Physics, Semiconductor Opto electronics- Solid State Materials, Emitters, Detectors and Amplifiers, Semiconductor Emitters- LEDs, Diodes, SLDs, CCDs, Semiconductor lasers- basic Structure, theory and device characteristics, DFB, DBR, Quantum well lasers ,Laser diode arrays, VCSEL etc. Semiconductor photo detectors:Materials - Si, Hg Cd Te, InGa As, Al Ga As, GaN etc for different wavelengths.

Detectors :Photoconductors, photo diodes, PIN , APD ,Photo transistors, solar cells, CCDs, IR and UV detectors.

Quantum Mechanics: Fundamentals

Compensating TE modes of a symmetric step index planar, understanding modes, TE modes of parabolic index planar waveguide, TM modes of a symmetric step index planar waveguide, waveguide theory, Single mode fibers, pulse dispersion in single mode fibers, strip and channel wave guides, anisotropic waveguides, segmented waveguide, electro-optic and acousto optic waveguide devices, directional couplers, optical switch phase and amplitude modulators, filters etc, Y junction, power splitters, arrayed waveguide devices, fiber pigtailing, fabrication and integrated optical waveguides and devices, w

Sensor Overview: Photometry and Radiometry, Radiation Sources and characteristics. Detectors-Imaging and non imaging [Thermal detectors , Photon detectors, Detector arrays : CCDs, CID, FLIR etc.] and their characteristics.

Propagation of electro-magnetic in stratified dielectric medium, Fresnel equations Optical properties of materials, metals, semiconductors and dielectrics, optical glass materials in the visible and near infrared region, IR optical materials, Multilayer thin film optics, Antireflection coatings, Band pass optical filters, edge filters, dichroics, Design –Optimization techniques for thin film multilayer, Merit function as applied to thin film coatings. Brief review of different optimization techniques as applied to optical coatings.

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