Module 1: Design and simulation

This module focuses on design and simulation aspects of sensors, actuators and sensor systems. The laboratory course provides an overview of numerical and analytical modelling and design of microsystems using leading software in the field such as Coventor, MEMS+ or COMSOL Multiphysics for MEMS

Module 2: Fabrication and characterization of MEMS devices

1. Familiarization of unit processes and Fabrication of MEMS structures such as Micro cantilever beam/suspended membrane etc.

Classical scaling in CMOS, Moore’s law, clean room concept, material properties, crystal structure, lattice, growth of single crystal Si, cleaning and etching, thermal oxidation, dopant diffusion in silicon, deposition & growth (PVD, CVD, ALD, epitaxy, MBE, ALCVD etc.), ion- implantation, lithography (Photolithography, EUV lithography, X-ray lithography, e-beam lithography etc.), etch and cleaning, CMOS process integration, back end of line processes (Copper damascene process, Metal interconnects; Multi-level metallization schemes), advanced technologies (SOI MOSFETs, Strained Si, Silic

• Refer Elective List

• Refer Elective List

• Modelling and simulation of a physical systems
• Control system design using time and frequency domain methods
• Experimental validation/demonstration

Note: Students are advised to do projects independently. Evaluation is based on midterm and final presentation of the work done.

Nonlinear Control: An introduction to vector fields, flows and integral curves of differential equations, Lie Brackets, Frobenious theorem, Orbits, accessibility and controllability, Control design based on Liapunov’s method

Feedback Linearization: Feedback Linearization and the canonical form, Input‐state Linearization of SISO systems, Input output Linearization of SISO systems

Basic mathematical concepts: Finite dimensional optimization, Infinite dimensional optimization, Conditions for optimality, Performance measures for optimal control problems.

• Refer Elective List

Introduction: Electro-mechanical energy conversion, classification of electric drives,requirements of electric drives, four quadrant operation, selection of motors for different applications.

DC Motor Drives:DC-DC Converter fed drives, basic concepts, closed loop control, stability.

Asynchronous Motor Drives: Modeling of induction motors, reference frame theory, speed-torque characteristics, scalar control of induction motors, closed-loop operation, vector control and field orientation, sensor- less control, direct torque and flux control.