MEMS Foundry processes, CMOS-MEMS Integration: Design and technology, Bonding & Packaging of MEMS, MEMS reliability, non-silicon MEMS, Interface electronics for sense and drive in microsystems, MEMS and circuit noise sources, Noise and Offset Cancellation Technique, testing and calibration approaches in integrated microsystems. MEMS Sensors and Actuators: Case Studies (Mechanical, Inertial, bio/chemical, Microfluidics, RF Applications.); Future Directions and developments (Integrated Nano- Electro-Mechanical Systems (NEMS), NEMS oscillators and sensors)

This nano electronics course provides an introduction to more advanced topics, including the Non- Equilibrium Green’s Function (NEGF) method widely used to analyse quantum transport in nanoscale devices.

Basics of data conversion systems. Sampling theory. Sample and hold circuits. Linearity, noise in mixed signal systems. Comparator design. Preamplifier design. Offset – source, analysis, offset cancellation. ADC topologies – comparative study and analysis. Analysis and design of multiple DAC architectures. Deriving opamp specifications from system level requirements. Non- idealities in ADCs and DACs and compensation techniques. Impact of layout parasitics on the performance of ADCs and DACs. Introduction to high-speed wireline communication circuits.

Design and develop initial design concepts and architectures that are in the area of VLSI and Microsystems using VLSI/CAD design tools based on a set of practical specifications.

Analysis of VLSI circuits and microsystems and efficacy determination with the help of simulation tools.

The layout and test plans/mask layout for hardware verification/fabrication of the simulated system/device

Module 1: Microelectronics Device and Process Simulation Syllabus This module focuses on the simulation of fabrication processes and the microelectronics devices such as short channel MOSFET etc. using TCAD tools for Micro and nanoelectronic devices. The process simulation enables one to experiment with the device fabrication flow. The device simulation involves simulating the electrical characteristics of a process simulated/fabricated device.

Module 1: Design and simulation

This module focuses on design and simulation aspects of sensors, actuators and sensor systems. The laboratory course provides an overview of numerical and analytical modelling and design of microsystems using leading software in the field such as Coventor, MEMS+ or COMSOL Multiphysics for MEMS

Module 2: Fabrication and characterization of MEMS devices

1. Familiarization of unit processes and Fabrication of MEMS structures such as Micro cantilever beam/suspended membrane etc.